Electron microscopy characterization of higher manganese silicide film structure on silicon
Crossref DOI link: https://doi.org/10.1134/S1995078016050128
Published Online: 2016-10-20
Published Print: 2016-09
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Orekhov, Andrey S.
Kamilov, T. S.
Orekhov, Anton S.
Arkharova, N. A.
Rakova, E. V.
Klechkovskaya, V. V.
License valid from 2016-09-01