Study of the Effect of Laser Radiation on the Parameters of Alumina Films Formed by Atomic Layer Deposition
Crossref DOI link: https://doi.org/10.1134/S199507801805004X
Published Online: 2019-03-18
Published Print: 2018-09
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Dedkova, A. A.
Dyuzhev, N. A.
Kireev, V. Yu.
Klemente, I. E.
Myakon’kikh, A. V.
Rudenko, K. V.
Text and Data Mining valid from 2018-09-01
Article History
Received: 7 May 2018
Accepted: 28 October 2018
First Online: 18 March 2019