Characterization of Thin Boron and Silicon Carbonitride Films by Wavelength Dispersive Spectroscopy
Crossref DOI link: https://doi.org/10.1134/S2070205117060211
Published Online: 2018-03-15
Published Print: 2017-11
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Sulyaeva, V. S.
Plekhanov, A. G.
Maksimovskii, E. A.
Fainer, N. I.
Rumyantsev, Yu. M.
Kosinova, M. L.
Text and Data Mining valid from 2017-11-01
Article History
Received: 4 July 2016
First Online: 15 March 2018