Influence of Hydrogen on the Structure of Cerium Films Obtained by Magnetron Sputter Deposition on Semiconductor Wafers
Crossref DOI link: https://doi.org/10.1134/S2075113320040425
Published Online: 2020-08-07
Published Print: 2020-07
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Verbetskii, V. N.
Mitrokhin, S. V.
Badun, G. A.
Evlashin, S. A.
Tepanov, A. A.
Bunyaev, V. A.
Text and Data Mining valid from 2020-07-01
Version of Record valid from 2020-07-01
Article History
Received: 16 September 2019
Revised: 30 September 2019
Accepted: 22 October 2019
First Online: 7 August 2020