Molecular Layering of Silicon Nitride Nanolayers with the Use of Ammonia Plasma
Crossref DOI link: https://doi.org/10.1134/S2075113321010081
Published Online: 2021-02-22
Published Print: 2021-01
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Ezhovskii, Yu. K.
Mikhailovskii, S. V.
Text and Data Mining valid from 2021-01-01
Version of Record valid from 2021-01-01
Article History
Received: 28 October 2019
Revised: 14 January 2020
Accepted: 25 February 2020
First Online: 22 February 2021