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Evaluation of plasma density in RF CCP discharges from ion current to Langmuir probe: experiment and numerical simulation

Crossref DOI link: https://doi.org/10.1140/epjd/e2014-50313-2

Published Online: 2015-01-21

Published Print: 2015-01

Update policy: https://doi.org/10.1007/springer_crossmark_policy

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