Experimental and DFT study of nitrogen atoms interactions with SiOCH low-κ films
Crossref DOI link: https://doi.org/10.1140/epjd/e2017-70618-8
Published Online: 2017-05-18
Published Print: 2017-05
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Voronina, Ekaterina N.
Mankelevich, Yuri A.
Rakhimova, Tatyana V.
Palov, Alexander P.
Lopaev, Dmitry V.
Zyryanov, Sergey M.
Zotovich, Alexey I.
Baklanov, Mikhail R.
License valid from 2017-05-01