Driving frequency fluctuations in pulsed capacitively coupled plasmas
Crossref DOI link: https://doi.org/10.1140/epjd/e2017-80096-7
Published Online: 2017-09-26
Published Print: 2017-09
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Poulose, John
Goeckner, Matthew
Shannon, Steven http://orcid.org/0000-0001-8317-6949
Coumou, David
Overzet, Lawrence http://orcid.org/0000-0001-7277-0387
License valid from 2017-09-01