Reactive pathways of hydrogen and carbon removal from organosilicate glass low-κ films by F atoms
Crossref DOI link: https://doi.org/10.1140/epjd/e2017-80136-4
Published Online: 2017-07-06
Published Print: 2017-07
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Voronina, Ekaterina N.
Mankelevich, Yuri A.
Rakhimova, Tatyana V.
License valid from 2017-07-01