Evaluation of oxygen species during E–H transition in inductively coupled RF plasmas: combination of experimental results with global model
Crossref DOI link: https://doi.org/10.1140/epjd/e2018-80720-0
Published Online: 2018-05-22
Published Print: 2018-05
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Meichsner, Jürgen
Wegner, Thomas
Text and Data Mining valid from 2018-05-01
Article History
Received: 23 November 2017
Revised: 19 February 2018
First Online: 22 May 2018