Numerical investigation of the effect of variation of gas mixture ratio on density distribution of etchant species (Br, Br+, Cl, Cl+, and H) in HBr/Cl2/Ar plasma discharge
Crossref DOI link: https://doi.org/10.1140/epjd/e2020-100633-5
Published Online: 2020-06-11
Published Print: 2020-06
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Majeed, Muhammad
Gul, Banat
Zia, Gulfam
Aman-ur-Rehman,
Text and Data Mining valid from 2020-06-01
Version of Record valid from 2020-06-01
Article History
Received: 14 December 2019
Revised: 4 March 2020
First Online: 11 June 2020