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Influence of bias voltage rise time, pressure and magnetic field on the boundary layer time evolution of a thermal collisional magnetized plasma in plasma immersion ion implantation

Crossref DOI link: https://doi.org/10.1140/epjd/s10053-024-00884-w

Published Online: 2024-07-02

Published Print: 2024-07

Update policy: https://doi.org/10.1007/springer_crossmark_policy

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