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Effect of N2/Ar on structure and hardness of TaN-Ag thin films deposited by DC cylindrical magnetron sputtering

Crossref DOI link: https://doi.org/10.1140/epjp/i2014-14080-8

Published Online: 2014-05-09

Published Print: 2014-05

Update policy: https://doi.org/10.1007/springer_crossmark_policy

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