The effect of bias voltage on microstructure and hardness of TiN films grown by ion coating deposition
Crossref DOI link: https://doi.org/10.1140/epjp/i2015-15029-1
Published Online: 2015-02-24
Published Print: 2015-02
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Balashabadi, P.
Larijani, M. M.
Shokri, A. -A.
Jafari-Khamse, E.
Seyedi, H.
Eshghi, S.
Text and Data Mining valid from 2015-02-01