Studies of the micromorphology of sputtered TiN thin films by autocorrelation techniques
Crossref DOI link: https://doi.org/10.1140/epjp/i2017-11801-5
Published Online: 2017-12-14
Published Print: 2017-12
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Smagoń, Kamil
Stach, Sebastian
Ţălu, Ştefan
Arman, Ali
Achour, Amine
Luna, Carlos
Ghobadi, Nader
Mardani, Mohsen
Hafezi, Fatemeh
Ahmadpourian, Azin http://orcid.org/0000-0002-6168-4771
Ganji, Mohsen
Grayeli Korpi, Alireza
License valid from 2017-12-01