Theoretical modeling and numerical simulation of enhanced graphene growth under the influence of oxidizers in RF-PECVD plasma using finite element method
Crossref DOI link: https://doi.org/10.1140/epjp/s13360-023-03917-2
Published Online: 2023-04-07
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Khanna, Sagar
Sharma, Suresh C. http://orcid.org/0000-0003-2170-195X
Text and Data Mining valid from 2023-04-07
Version of Record valid from 2023-04-07
Article History
Received: 17 November 2022
Accepted: 20 March 2023
First Online: 7 April 2023
Declarations
:
: The authors have no competing interests to disclose.