Optimization of the molecular sieving properties of amorphous SiCXNY:H hydrogen selective membranes prepared by PECVD
Crossref DOI link: https://doi.org/10.1140/epjst/e2015-02511-y
Published Online: 2015-07-30
Published Print: 2015-07
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Haacké, M.
Coustel, R.
Rouessac, V.
Drobek, M.
Roualdès, S.
Julbe, A.
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