Ion beam sputter deposition of TiO2 films using oxygen ions
Crossref DOI link: https://doi.org/10.1140/epjb/e2018-90293-3
Published Online: 2018-10-15
Published Print: 2018-10
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Pietzonka, Lukas
Lautenschläger, Thomas
Spemann, Daniel
Finzel, Annemarie
Gerlach, Jürgen W.
Frost, Frank
Bundesmann, Carsten
Text and Data Mining valid from 2018-10-01
Article History
Received: 27 April 2018
Revised: 17 June 2018
First Online: 15 October 2018