Heteroepitaxial growth of TiN film on MgO (100) by reactive magnetron sputtering
Crossref DOI link: https://doi.org/10.1186/1556-276X-9-551
Published Online: 2014-10-03
Published Print: 2014-12
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Chen, Wei-Chun
Peng, Chun-Yen
Chang, Li
Text and Data Mining valid from 2014-10-03
Article History
Received: 25 June 2014
Accepted: 10 September 2014
First Online: 3 October 2014