Phase-change properties of GeSbTe thin films deposited by plasma-enchanced atomic layer depositon
Crossref DOI link: https://doi.org/10.1186/s11671-015-0815-5
Published Online: 2015-02-28
Published Print: 2015-12
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Song, Sannian
Yao, Dongning
Song, Zhitang
Gao, Lina
Zhang, Zhonghua
Li, Le
Shen, Lanlan
Wu, Liangcai
Liu, Bo
Cheng, Yan
Feng, Songlin
License valid from 2015-02-28
Article History
Received: 16 November 2014
Accepted: 12 February 2015
First Online: 28 February 2015