Effects of Annealing Ambient on the Characteristics of LaAlO3 Films Grown by Atomic Layer Deposition
Crossref DOI link: https://doi.org/10.1186/s11671-017-1889-z
Published Online: 2017-02-10
Published Print: 2017-12
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Zhao, Lu
Liu, Hong-xia
Wang, Xing
Fei, Chen-xi
Feng, Xing-yao
Wang, Yong-te
Funding for this research was provided by:
National Natural Science Foundation of China (61376099, 61434007)
Foundation for Fundamental Research of China (JSZL2016110B003)
License valid from 2017-02-10