Crossmark

Direct Growth of Al2O3 on Black Phosphorus by Plasma-Enhanced Atomic Layer Deposition

Crossref DOI link: https://doi.org/10.1186/s11671-017-2016-x

Published Online: 2017-04-20

Published Print: 2017-12

Update policy: https://doi.org/10.1007/springer_crossmark_policy

Authors

Wu, B. B.

Zheng, H. M.

Ding, Y. Q.

Liu, W. J.

Lu, H. L.

Zhou, P.

Chen, L.

Sun, Q. Q.

Ding, S. J.

Zhang, David W.
Funding

Funding for this research was provided by:

Start-up program (JIH1233003)

Shanghai Pujiang Program, China (16PJ1400800)
License Information

License valid from 2017-04-20