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Temperature-Dependent HfO2/Si Interface Structural Evolution and its Mechanism

Crossref DOI link: https://doi.org/10.1186/s11671-019-2915-0

Published Online: 2019-03-07

Published Print: 2019-12

Update policy: https://doi.org/10.1007/springer_crossmark_policy

Authors

Zhang, Xiao-Ying

Hsu, Chia-Hsun

Lien, Shui-Yang https://orcid.org/0000-0002-3289-9538
Wu, Wan-Yu

Ou, Sin-Liang

Chen, Song-Yan

Huang, Wei

Zhu, Wen-Zhang

Xiong, Fei-Bing

Zhang, Sam
Funding

Funding for this research was provided by:

Ministry of Science and Technology, Taiwan (104-2632-E-212-002‐, 104-2622-E-212-005-CC3, 104-2221-E-212-002-MY3)

National Natural Science Foundation of China (61474081, 61534005)

Science and Technology innovation Project of Xiamen (3502Z20183054, 3502Z20173040)

Science and Technology Program of the Educational Office of Fujian Province (JT180432)
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Article History

Received: 30 December 2018

Accepted: 25 February 2019

First Online: 7 March 2019

Competing interests

: The authors declare that they have no competing interests.

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