Document is current

Any future updates will be listed below

Micro-nanoscale laser subsurface vertical modification of 4H-SiC semiconductor materials: mechanisms, processes, and challenges

Crossref DOI link: https://doi.org/10.1186/s11671-025-04309-4

Published Online: 2025-07-16

Update policy: https://doi.org/10.1007/springer_crossmark_policy

About CrossMark