Nanoimprint lithography for nanodevice fabrication
Crossref DOI link: https://doi.org/10.1186/s40580-016-0081-y
Published Online: 2016-09-01
Published Print: 2016-12
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Barcelo, Steven
Li, Zhiyong
License valid from 2016-09-01