A modified squeeze equation for predicting the filling ratio of nanoimprint lithography
Crossref DOI link: https://doi.org/10.1186/s40580-017-0108-z
Published Online: 2017-06-13
Published Print: 2017-12
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Ryu, JiHyeong
Lee, Ho
Lee, Sang-Ho
Lim, HyungJun
Lee, JaeJong
License valid from 2017-06-13