Miniaturized load sensor using quartz crystal resonator constructed through microfabrication and bonding
Crossref DOI link: https://doi.org/10.1186/s40648-014-0003-x
Published Online: 2014-07-23
Published Print: 2014-12
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Murozaki, Yuichi
Nogawa, Kousuke
Arai, Fumihito
License valid from 2014-07-23
Article History
Received: 18 February 2014
Accepted: 12 May 2014
First Online: 23 July 2014