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Microstructural evolution of tantalum nitride thin films synthesized by inductively coupled plasma sputtering

Published Online: 2020-02-27

Published Print: 2020-12

Authors

Baik, Sung-Il https://orcid.org/0000-0002-9787-5377
Kim, Young-Woon
Funding

Funding for this research was provided by:

National Research Foundation of Korea (No.NRF-2019M3D1A1079215)
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Text and Data Mining valid from 2020-02-27

Version of Record valid from 2020-02-27
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Article History

Received: 27 November 2019

Accepted: 9 February 2020

First Online: 27 February 2020

Competing interests

: The authors declare that they have no competing interests.

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