Moisture barrier properties of thin organic-inorganic multilayers prepared by plasma-enhanced ALD and CVD in one reactor
Crossref DOI link: https://doi.org/10.1186/1556-276X-9-223
Published Online: 2014-05-07
Published Print: 2014-12
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Bülow, Tim
Gargouri, Hassan
Siebert, Mirko
Rudolph, Rolf
Johannes, Hans-Hermann
Kowalsky, Wolfgang
Article History
Received: 7 January 2014
Accepted: 11 April 2014
First Online: 7 May 2014