Nanofabrication on monocrystalline silicon through friction-induced selective etching of Si3N4 mask
Crossref DOI link: https://doi.org/10.1186/1556-276X-9-241
Published Online: 2014-05-16
Published Print: 2014-12
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Guo, Jian
Yu, Bingjun
Wang, Xiaodong
Qian, Linmao
Article History
Received: 8 April 2014
Accepted: 5 May 2014
First Online: 16 May 2014