Low-damage direct patterning of silicon oxide mask by mechanical processing
Crossref DOI link: https://doi.org/10.1186/1556-276X-9-269
Published Online: 2014-05-29
Published Print: 2014-12
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Miyake, Shojiro
Yamazaki, Shohei
Text and Data Mining valid from 2014-05-29
Article History
Received: 4 April 2014
Accepted: 17 May 2014
First Online: 29 May 2014