Released micromachined beams utilizing laterally uniform porosity porous silicon
Crossref DOI link: https://doi.org/10.1186/1556-276X-9-426
Published Online: 2014-08-22
Published Print: 2014-12
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Sun, Xiao
Keating, Adrian
Parish, Giacinta
Text and Data Mining valid from 2014-08-22
Article History
Received: 18 May 2014
Accepted: 12 August 2014
First Online: 22 August 2014