Digital holographic microscopy based on a modified lateral shearing interferometer for three-dimensional visual inspection of nanoscale defects on transparent objects
Crossref DOI link: https://doi.org/10.1186/1556-276X-9-471
Published Online: 2014-09-04
Published Print: 2014-12
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Seo, Kwang-Beom
Kim, Byung-Mok
Kim, Eun-Soo
Article History
Received: 17 July 2014
Accepted: 26 August 2014
First Online: 4 September 2014