Effect of sulfur hexafluoride gas and post-annealing treatment for inductively coupled plasma etched barium titanate thin films
Crossref DOI link: https://doi.org/10.1186/1556-276X-9-496
Published Online: 2014-09-15
Published Print: 2014-12
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Wang, Cong
Li, Yang
Yao, Zhao
Kim, Hong-Ki
Kim, Hyung-Jun
Kim, Nam-Young
Article History
Received: 11 July 2014
Accepted: 5 September 2014
First Online: 15 September 2014