Comparative analysis of barium titanate thin films dry etching using inductively coupled plasmas by different fluorine-based mixture gas
Crossref DOI link: https://doi.org/10.1186/1556-276X-9-530
Published Online: 2014-09-26
Published Print: 2014-12
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Li, Yang
Wang, Cong
Yao, Zhao
Kim, Hong-Ki
Kim, Nam-Young
Article History
Received: 17 July 2014
Accepted: 20 September 2014
First Online: 26 September 2014