Stepwise mechanism and H2O-assisted hydrolysis in atomic layer deposition of SiO2 without a catalyst
Crossref DOI link: https://doi.org/10.1186/s11671-014-0714-1
Published Online: 2015-02-18
Published Print: 2015-12
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Fang, Guo-Yong
Xu, Li-Na
Wang, Lai-Guo
Cao, Yan-Qiang
Wu, Di
Li, Ai-Dong
License valid from 2015-02-18
Article History
Received: 12 November 2014
Accepted: 23 December 2014
First Online: 18 February 2015