Optical properties and bandgap evolution of ALD HfSiOx films
Crossref DOI link: https://doi.org/10.1186/s11671-014-0724-z
Published Online: 2015-02-05
Published Print: 2015-12
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Yang, Wen
Fronk, Michael
Geng, Yang
Chen, Lin
Sun, Qing-Qing
Gordan, Ovidiu D
zhou, Peng
Zahn, Dietrich RT
Zhang, David Wei
License valid from 2015-02-05
Article History
Received: 16 November 2014
Accepted: 30 December 2014
First Online: 5 February 2015