Structure and photoluminescence of the TiO2 films grown by atomic layer deposition using tetrakis-dimethylamino titanium and ozone
Crossref DOI link: https://doi.org/10.1186/s11671-015-0790-x
Published Online: 2015-02-28
Published Print: 2015-12
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Jin, Chunyan
Liu, Ben
Lei, Zhongxiang
Sun, Jiaming
License valid from 2015-02-28
Article History
Received: 17 November 2014
Accepted: 27 January 2015
First Online: 28 February 2015