Effects of doping and annealing on properties of ZnO films grown by atomic layer deposition
Crossref DOI link: https://doi.org/10.1186/s11671-015-0801-y
Published Online: 2015-02-18
Published Print: 2015-12
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Wang, Aiji
Chen, Tingfang
Lu, Shuhua
Wu, Zhenglong
Li, Yongliang
Chen, He
Wang, Yinshu
License valid from 2015-02-18
Article History
Received: 13 November 2014
Accepted: 5 February 2015
First Online: 18 February 2015