AlGaN/GaN MISHEMTs with AlN gate dielectric grown by thermal ALD technique
Crossref DOI link: https://doi.org/10.1186/s11671-015-0802-x
Published Online: 2015-03-04
Published Print: 2015-12
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Liu, Xiao-Yong
Zhao, Sheng-Xun
Zhang, Lin-Qing
Huang, Hong-Fan
Shi, Jin-Shan
Zhang, Chun-Min
Lu, Hong-Liang
Wang, Peng-Fei
Zhang, David Wei
License valid from 2015-03-04
Article History
Received: 16 November 2014
Accepted: 5 February 2015
First Online: 4 March 2015