Novel 14-nm Scallop-Shaped FinFETs (S-FinFETs) on Bulk-Si Substrate
Crossref DOI link: https://doi.org/10.1186/s11671-015-0958-4
Published Online: 2015-06-02
Published Print: 2015-12
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Xu, Weijia
Yin, Huaxiang
Ma, Xiaolong
Hong, Peizhen
Xu, Miao
Meng, Lingkuan
License valid from 2015-06-02
Article History
Received: 16 February 2015
Accepted: 28 May 2015
First Online: 2 June 2015