Erratum to: Optical properties and bandgap evolution of ALD HfSiOxfilms
Crossref DOI link: https://doi.org/10.1186/s11671-015-1079-9
Published Online: 2015-09-29
Published Print: 2015-12
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Yang, Wen
Fronk, Michael
Geng, Yang
Chen, Lin
Sun, Qing-Qing
Gordan, Ovidiu D.
Zhou, Peng
Zahn, Dietrich R. T.
Zhang, David Wei
License valid from 2015-09-29