Temperature-Dependent Nanofabrication on Silicon by Friction-Induced Selective Etching
Crossref DOI link: https://doi.org/10.1186/s11671-016-1438-1
Published Online: 2016-04-27
Published Print: 2016-12
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Jin, Chenning
Yu, Bingjun
Xiao, Chen
Chen, Lei
Qian, Linmao
Funding for this research was provided by:
National Natural Science Foundation of China (51305365)
Fundamental Research Funds for the Central Universities (China) (2682015CX037)
License valid from 2016-04-27