Charge Splitting In Situ Recorder (CSIR) for Real-Time Examination of Plasma Charging Effect in FinFET BEOL Processes
Crossref DOI link: https://doi.org/10.1186/s11671-017-2309-0
Published Online: 2017-09-18
Published Print: 2017-12
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Tsai, Yi-Pei http://orcid.org/0000-0001-5780-2926
Hsieh, Ting-Huan
Lin, Chrong Jung
King, Ya-Chin
License valid from 2017-09-18