Atomic-Layer-Deposition of Indium Oxide Nano-films for Thin-Film Transistors
Crossref DOI link: https://doi.org/10.1186/s11671-017-2414-0
Published Online: 2018-01-09
Published Print: 2018-12
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Ma, Qian
Zheng, He-Mei
Shao, Yan
Zhu, Bao
Liu, Wen-Jun http://orcid.org/0000-0003-4217-8838
Ding, Shi-Jin
Zhang, David Wei
License valid from 2018-01-09