Xue, HuiWen
He, QiMing
Jian, GuangZhong
Long, ShiBing
Pang, Tao
Liu, Ming
Funding for this research was provided by:
National Natural Science Foundation of China (61521064, 61522408, 61574169, 61334007, 61474136, and 61574166)
Ministry of Science and Technology of the People's Republic of China (2016YFA0201803, 2016YFA0203800, and 2017YFB0405603)
the Key Research Program of Frontier Sciences of Chinese Academy of Sciences (QYZDB-SSW-JSC048 and QYZDY-SSW-JSC001)
the Beijing Municipal Science and Technology Project (Z171100002017011)
the Opening Project of the Key Laboratory of Microelectronic Devices & Integration Technology, Institute of Microelectronics of Chinese Academy of Sciences (Not applicable)
Article History
Received: 3 August 2018
Accepted: 6 September 2018
First Online: 19 September 2018
Competing Interests
: The authors declare that they have no competing interests.
: Springer Nature remains neutral with regard to jurisdictional claims in published maps and institutional affiliations.