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Fabrication of polydimethylsiloxane nanofluidic chips under AFM tip-based nanomilling process

Crossref DOI link: https://doi.org/10.1186/s11671-019-2962-6

Published Online: 2019-04-17

Published Print: 2019-12

Update policy: https://doi.org/10.1007/springer_crossmark_policy

Authors

Wang, Jiqiang

Yan, Yongda

Geng, Yanquan

Gan, Yang

Fang, Zhuo
Funding

Funding for this research was provided by:

National Natural Science Foundation of China (51675134, 51705104)

Innovative Research Groups of the National Natural Science Foundation of China (51521003)

Key Laboratory of Micro-systems and Micro-structures Manufacturing of Ministry of Education (Harbin Institute of Technology No. 2017KM005)

China Postdoctoral Science Foundation (No. 2017M610206, 2018T110289)
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Article History

Received: 26 December 2018

Accepted: 1 April 2019

First Online: 17 April 2019

Competing interests

: The authors declare that they have no competing interests.

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