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Thermal Decomposition In Situ Monitoring System of the Gas Phase Cyclopentadienyl Tris(dimethylamino) Zirconium (CpZr(NMe2)3) Based on FT-IR and QMS for Atomic Layer Deposition

Crossref DOI link: https://doi.org/10.1186/s11671-020-03400-2

Published Online: 2020-09-04

Published Print: 2020-12

Update policy: https://doi.org/10.1007/springer_crossmark_policy

Authors

An, Jong-Ki

Choi, Eunmi

Shim, Seob

Kim, Hayeong

Kang, Goru

Yun, Ju-Young
Funding

Funding for this research was provided by:

Korea Institute of Industrial Technology (GP2020-012-12)

Development of Fundamental Technology for Industrial Metrology funded by Korea Research Institute of Standards and Science (GP2020-011-08)
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Text and Data Mining valid from 2020-09-04

Version of Record valid from 2020-09-04
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Article History

Received: 5 May 2020

Accepted: 11 August 2020

First Online: 4 September 2020

Competing Interests

: The authors declare that they have no competing interests

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