Crystalline characteristics of annealed AlN films by pulsed laser treatment for solidly mounted resonator applications
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Lin, H. K.
Huang, Y. J.
Shih, W. C.
Chen, Y. C.
Chang, W. T.
Funding for this research was provided by:
Ministry of Science and Technology, Taiwan (105-2221-E-020-007)
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22 October 2018
6 March 2019
16 March 2019