Ultra-low voltage MEMS switch using a folded hinge structure
Crossref DOI link: https://doi.org/10.1186/s40486-014-0002-y
Published Online: 2014-06-17
Published Print: 2014-12
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Kim, Min-Wu
Song, Yong-Ha
Ko, Seung-Deok
Ahn, Sang-Joon
Yoon, Jun-Bo
License valid from 2014-06-17
Article History
Received: 7 February 2014
Accepted: 28 April 2014
First Online: 17 June 2014